Description
Optical MEMS (micro-electro-mechanical systems) devices have been utilized in plenty of applications including fiber-optic communications, projection TVs and in biomedical imaging. MEMS-based spatial light modulators (SLM) provide a compact, large scale, and cost-effective method to these and other applications. On this book, we introduce the design and fabrication of SLMs for three such applications; coherent communication, adaptive optics and maskless lithography. This book must lend a hand not only those engineers working on these applications but in other fields, such as biomedical imaging, to higher bear in mind SLMs and their capabilites. This must also lend a hand optical MEMS engineers and those new to the field to realize some knowledge at the design and fabrication process for developing MEMS mirror arrays.